Abstract

 Rare earth oxide (REO) atomic layer deposition (ALD) processes are investigated for hydrophobic coatings. Thermal and plasma-enhanced ALD (PE-ALD) Er₂O₃ and Dy₂O₃ are developed using the newly synthesized Er and Dy precursors bis-methylcyclopentadienyl-diisopropyl-acetamidinate-erbium and bis-isopropylcyclopentadienyl-diisopropyl-acetamidinate-dysprosium, with H₂O and O₂ plasma counter oxidants. The Er and Dy precursors show typical ALD growth characteristics with no nucleation incubation, indicating that they are suitable ALD precursors. The hydrophobicities of ALD-grown Er₂O₃ and Dy₂O₃ are investigated, together with those of ALD-grown Y₂O₃, La₂O₃, and CeO₂ that were previously developed for high-k applications. All the ALD-grown REOs show high hydrophobicity, with water contact angles as high as 90°. After annealing at 500 °C in air for 2 h, hydrophobicity is degraded depending on the kind of material; this degradation is related to the hygroscopy of REOs. In addition, we demonstrate the fabrication of a superhydrophobic surface by depositing highly conformal ALD REO films on 3D Si nanowire nanostructures. The Si NWs are conformally coated with ALD Y₂O₃, yielding a surface with a water contact angle of about 158°. The ALD REOs reported herein should find widespread applicability in the fabrication of robust hydrophobic coatings.